This paper will discuss a newly developed implementation of ISO 16063 style primary accelerometer calibrations. The goal is a laser primary accelerometer calibration system capable of performing low uncertainty primary accelerometer calibrations while maintaining the throughput and simplicity of a traditional back-to-back calibration system.
Primary accelerometer calibrations typically require multiple measurement passes at several locations across the device to be calibrated by primary means. This paper discloses the novel use of a dual beam, simultaneous primary calibration laser interferometer based system. The use of dual beam and multiple pass Michelson Interferometers greatly improves not only the reliability of the measurement, but significantly simplifies the setup and measurement process of primary laser calibrations of accelerometers.

The Bilateral Comparison between National Institute of Metrology (Thailand), NIMT and National Metrology Institute of Japan, (NMIJ) was conducted in order to confirm the capability of NIMT. The calibration of charge sensitivity of the accelerometer was carried by interferometry method according to ISO 16063-11. The calibration results were then compared at the frequency range of 50Hz to 5000Hz. The reference standard accelerometer Bruel & Kjaer 8305 was assigned as the artifact.
The calibration methods of NMIJ were according to the Fringe-Counting Method at the frequency range of 20 Hz – 80 Hz and Sine Approximation Method at the frequency range of 100 Hz – 5000 Hz. While the calibration methods of NIMT were according to the Fringe-Counting Method at the frequency range of 50 Hz – 800 Hz and Minimum Point Method at the frequency range of 1000 Hz - 5000 Hz.
The comparison results were agreeable which the EN value was less than 1.0 for the entire frequency range.

During the 18th IMEKO World Congress 2006 in Rio de Janeiro the members of the TC22 discussed the options to validate and compare different algorithms used worldwide by NMIs in the field of primary accelerometer calibration. The goal would be to validate calibration results calculated with the help of reference data sets and compare the different algorithms with data sets including well defined disturbances. This would expose the susceptibility or immunity of the algorithms with respect to signal disturbances.
The challenge in such an approach is the multitude of measurement set-ups available in the NMIs and the respective diversity of parameters and data sources. In order to cope with this diversity the approach of a web-based data generator will be introduced. The aim is to provide a browser-based interface for a data synthesis software.
Details about the incorporated calibration set-ups, the considered disturbances, the mode of calculation and the internet technology used for deployment will be discussed in the presentation.

SPEKTRA is a leading manufacturer of Calibration Systems for vibration and acoustic sensors for use in laboratory applications.
Special hardware, software and system concepts have been jointly developed for the mass production of MEMS. Since in sensor production and some metrological applications extreme requirements for sine and shock levels and frequency ranges have to be met, SPEKTRA has decided to design special exciters of their own.
The paper will present new designs, measurement results and examples of applications to calibration systems. The extended capabilities of the high frequency air bearing vibration exciter SE-09 will be discussed in more detail. Applications to primary and secondary calibration systems will be demonstrated and measurement results will be given.
For the high shock exciters of types HOP-S and HOP-P, theoretical considerations of how to scale up their shock amplitudes without compromising highest quality signal waveforms and excellent stability of mechanical excitation will be discussed and compared with practical measurement results.
Finally an outlook on further developments of vibration and shock exciters for use in calibration and sensor production will be given.

An inter-comparison in the high oil pressure range was arranged in 2005 – 2007. The participating laboratories were CMI / Czech Republic, Metas / Switzerland, MIKES / Finland, NMi-VSL / The Netherlands, PTB / Germany, SMD / Belgium and SP / Sweden. The transfer standard was a Desgranges & Huot piston-cylinder unit with a nominal effective area of 1,96 mm², mounted in a D&H 5316 balance body. The participants determined the effective area at ten nominal pressures from 50 MPa to 500 MPa in steps of 50 MPa. All the results were in a good agreement with the reference values, calculated as weighted means of the results from the four primary level laboratories. The results fully support the uncertainties claimed in the CMC tables of the participants.