The paper describes traceable nanometrology based on a nanopositioning machine with integrated nanoprobes. The operation of a high-precision long range three-dimensional nanopositioning and nanomeasuring machine (NPMMachine) having a resolution of 0.1 nm over the positioning and measuring range of 25 mm x 25 mm x 5 mm is explained. An Abbe offset-free design of three miniature plan mirror interferometers and applying a new concept for compensating systematic errors resulting from mechanical guide systems provide very small uncertainties of measurement. The NPM-Machine has been developed by the Institute of Process Measurement and Sensor Technology of the Technische Universität Ilmenau and manufactured by the SIOS Messtechnik GmbH Ilmenau. The machines are operating successfully in several German and foreign research institutes including the Physikalisch-Technische Bundesanstalt (PTB), Germany.
The integration of several, optical and tactile probe systems and nanotools makes the NPM-Machine suitable for various tasks, such as large-area scanning probe microscopy, mask and wafer inspection, nanostructuring, biotechnology and genetic engineering as well as measuring mechanical precision workpieces, precision treatment and for engineering new material. Various developed probe systems have been integrated into the NPM-Machine. The measurement results of a focus sensor, metrological AFM, white light sensor, tactile stylus probe and of a 3D-micro-touch-probe are presented. Single beam-, double beam- and triple beam interferometers built in the NPM-Machine for six degrees of freedom measurements are described.

Measurement uncertainty characterizes the quality of a measurement result. It is determined according GUM by modeling the measurement process with all effective influences. Compared to conventional measurement processes detailed models in micro- and nanometrology are not yet sufficiently published due to ongoing research on influences and correlations. In the paper the modeling background according GUM is shown and research results and a demo application in modularization of measurement processes in micro and nanotechnology will be presented.

In this paper we present a new type of silicon micro cantilever structures with integrated tips for measuring microstructured surfaces. Results of FEM simulation and calibration results will be discussed. Also the fabrication of the structures and the fabrication of the tips are described.

The paper goal is to describe the way in which the Giant Magnetoimpedance Effect (GMI) occurring in the magnetic amorphous wires can be utilized to detect small rotational movements. The operation principle is based on modification of the wire impedance under action of a torsional stress when an ac low current flows through it. The schematic overview of an angle sensor built around this effect, along with some experimental results obtained upon the functional model are presented in the paper. Analysis was performed on the sensor behavior under different frequencies and intensities of the current flowing through the wire as well as under different values of an axial dc magnetic field applied to the wire in order to control the angle span of the sensor.

The main purpose of this work is to investigate the errors on secondary surfaces generated to joint free form surfaces of complex parts measured with Coordinate Measuring Machines (CMM) and modeled with CAD techniques. The approach involves the measurement of a complex part and fitting using NURBS curves and surfaces. The errors were determined by difference between determined points on secondary surfaces and fitted CAD surface.