EXPERIMENTAL AND NUMERICAL CHARACTERIZATION OF XY PIEZOELECTRIC NANOPOSITIONERS |
|---|
| Gilder Nader, Ronny Calixto Carbonari, EmÃlio Carlos Nelli Silva |
- Abstract:
- XY nanopositioners consist of two piezoceramic actuating a compliant mechanism. Prototypes were manufactured in aluminum using a wire EDM process, and bonded to PZT5A. Finite element simulations were carried out using the commercial ANSYS software application. Experimental analyses were conducted using laser interferometry to measure displacement, while considering a quasi-static excitation.
- Keywords:
- nanopositioners, MEMS, laser Interferometry
- Download:
- PWC-2006-TC15-006u.pdf
- DOI:
- -
- Event details
- Event name:
- XVIII IMEKO World Congress
- Title:
Metrology for a Sustainable Development
- Place:
- Rio de Janeiro, BRAZIL
- Time:
- 17 September 2006 - 22 September 2006