Static Characterization of the X-Hall Current Sensor in BCD10 Technology |
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| Gian Piero Gibiino, Marco Crescentini, Marco Marchesi, Marco Cogliati, Aldo Romani, Pier Andrea Traverso |
- Abstract:
- This work presents on-wafer characterization measurements of the X-Hall current sensor architecture implemented in 90-nm BCD10 silicon process by STMicroelectronics. With respect to a previous implementation, technological improvements in terms of active region, isolation layers, and metal stack configuration result in a substantially improved sensitivity. In addition, it is reported that the sensitivity can be further improved by applying a negative voltage to the depletion layer.
- Download:
- IMEKO-TC4-2022-58.pdf
- DOI:
- 10.21014/tc4-2022.58
- Event details
- IMEKO TC:
- TC4
- Event name:
- TC4 Symposium 2022
- Title:
25th IMEKO TC4 Symposium and 23nd International Workshop on ADC and DAC Modelling and Testing (IWADC)
- Place:
- Brescia, ITALY
- Time:
- 12 September 2022 - 14 September 2022