First results on the functional characterization of two rotary comb-drive actuated MEMS microgripper with different geometry |
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| Gabriele Bocchetta, Giorgia Fiori, Andrea Scorza, Nicola Pio Belfiore, Salvatore Andrea Sciuto |
- Abstract:
- Microgrippers (MGs) are Micro Electro-Mechanical System (MEMS) devices able to manipulate cells and micrometric objects. In order to carry out their functional characterization, a comparison between two electrostatic rotary combdrives actuated prototypes with different geometries through an image analysis-based method is proposed. This study aims at evaluating and comparing the MGs displacement as a function of the supply voltage. The two investigated geometries are equipped with a single rotary comb-drive and a double rotary comb-drive actuation. MGs data have been collected through a trinocular optical microscope with a digital camera and processed by means of an algorithm implemented ad hoc in MATLAB. Based on the promising results obtained, further studies are going to be carried out by including other geometries and improving the experimental setup and implemented method.
- Download:
- IMEKO-TC4-2022-28.pdf
- DOI:
- 10.21014/tc4-2022.28
- Event details
- IMEKO TC:
- TC4
- Event name:
- TC4 Symposium 2022
- Title:
25th IMEKO TC4 Symposium and 23nd International Workshop on ADC and DAC Modelling and Testing (IWADC)
- Place:
- Brescia, ITALY
- Time:
- 12 September 2022 - 14 September 2022