A NEW PRIMARY GAS FLOW STANDARD FOR FLOW RATE MEASUREMENT FROM 0.001 TO 1000 NANO mol/s |
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| Wu Jian, Chua Hock Ann |
- Abstract:
- A primary gas flow standard was designed and developed in SPRING for the calibration of gas flow meters or leak rate standard at nano-flow rate range of 10-6 to 10-12 mol/s. It is also used to generate very low gas flow for SPRING’s continuous expansion vacuum primary standard. The primary standard consists of two piston-cylinder flow units with diameters of 10 mm and 25 mm, which provide wider measurement ranges. A stepping motor is used to drive the piston moving at precise speed via a digital micrometer. Two methods, constant pressure method and constant volume method, are used for the measurement of flow rate. Flow meters can be calibrated automatically using a software program developed at SPRING. The expanded measurement uncertainty of the primary gas flow standard is estimated to be 1% of the readings.
- Keywords:
- Nanofluidics, Gas flow, Primary Standard, Measurement Uncertainty
- Download:
- PWC-2006-TC9-022u.pdf
- DOI:
- -
- Event details
- Event name:
- XVIII IMEKO World Congress
- Title:
Metrology for a Sustainable Development
- Place:
- Rio de Janeiro, BRAZIL
- Time:
- 17 September 2006 - 22 September 2006