Since late 1970s, MEMS mass flow sensors have been emerged for gas mass flow measurement providing cost effective alternatives. However, unlike the other MEMS technology, MEMS mass flow sensor market grows at a very slow pace dominating only in automobile air mass flow sensing. The MEMS mass flow meters have been few since year 2000 and are limited to low flow speed applications in dry and clean gases due to the vulnerability in design and adversity for moisture and particles. Siargo since 2003 has been dedicated to provide its patented MEMS mass flow technology excelling for the traditional counterparts and targeting as the alternatives to the century-old diaphragm utility technology and many others in industrial applications. A wide spectrum of product lines has been introduced to the market and has been well accepted by the customers. This paper presents a comprehensive analysis of the existing MEMS mass flow technology, products on markets, and the prospective of the MEMS mass flow technology in the coming years.
