NON-CONTACT OPTICAL METROLOGY FOR AUTOMATED IN-PROCESS INSPECTION OF MACHINED SURFACES |
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| Wojciech Kaplonek, Czeslaw Lukianowicz |
- Abstract:
- This work presents a concise review of selected issues related to non-contact optical metrology in applications where automated in-process inspection is involved. A brief description of the in-process inspection and applicable procedures were presented. A laser method based on analysis of scattered light was elaboratedin greater detail. In addition to the above, a short review of selected technical solutions in a form of an experimental and commercially manufactured measurement systems was presented. This review concentrates on describing of the most important metrological parameters, principles of operation and areas of applications of the aforementioned measurement systems. In the final part of the work a subjective selection of literature references was listed.
- Keywords:
- optical metrology, laser scatterometry, inprocess inspection, machined surfaces, surface texture
- Download:
- IMEKO-TC14-2013-15.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC14
- Event name:
- TC14 ISMQC 2013
- Title:
11th International Symposium on Measurement and Quality Control
- Place:
- Cracow and Kielce, POLAND
- Time:
- 11 September 2013 - 13 September 2013