FIBER PROBE WITH INTERFEROMETRIC Z-MEASUREMENT |
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| Sabine Linz, Alexander Schöch, Carlo Bach, Andreas Ettemeyer, Buchs, Switzerland, Benjamin Hopp, Matthias Andräs |
- Abstract:
- Increasing manufacturing accuracy requirements enforce the development of innovative and highly sensitive measuring tools. The recent introduction of optical fiber probes combined classical tactile measurement methods with optical read out and reaches measurement uncertainties as small as 0.1 micrometers. In this paper we describe an innovative way to measure the z-position of the fiber tip itself with high accuracy by using interferometry.
- Download:
- IMEKO-TC14-2011-07.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC14
- Event name:
- TC14 LMPMI Symposium 2011
- Title:
10th Symposium on Laser Metrology for Precision Measurement and Inspection in Industry
- Place:
- Braunschweig, GERMANY
- Time:
- 12 September 2011 - 14 September 2011