MICROMACHINED SEMICONDUCTOR FLOW SENSOR |
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| F. Kohl, R. Fasching, A. Glaninger, R. Chabicovsky, A. Jachimowicz, G. Urban |
- Abstract:
- Miniaturized flow sensors based on thin film germanium thermistors offer high flow sensitivities and short response times. The thermistors are placed on a silicon nitride diaphragm carried by a silicon frame. Using the controlled overtemperature scheme the measurable airflow velocity ranges from 0.001 m/s to 200 m/s. The response time to large step changes of the air velocity is less than 20 ms. Our experiments show that the sensor is also applicable to acoustic flow measurements.
- Keywords:
- electrocalorimetric flow measurement, thin film germanium thermistors, micromachined flow sensor
- Download:
- IMEKO-WC-2000-TC9-P238.pdf
- DOI:
- -
- Event details
- Event name:
- XVI IMEKO World Congress
- Title:
Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future
- Place:
- Vienna, AUSTRIA
- Time:
- 25 September 2000 - 28 September 2000