THICK-FILM THERMALLY EXCITED RESONATOR FOR MASS FLOW MEASUREMENT |
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| D. Crescini, D. Marioli, A. Taroni |
- Abstract:
- This paper illustrates the design and the development of a thick-film mass flow sensor based on the frequency shift of a resonating ceramic structure. The mechanical oscillator realized uses a measurement principle of thermoanemometric type. The sensor can measure mass flows up to 15 × 104 sccm (sccm: 10 sccm = 0.17 mg/s), with high sensitivity. Here we report on the first prototype consisting of a beam 0.254 mm thick , 4 mm large and 17 mm long, in which the temperature variations induced by flow, affect the resonance frequency. Predicted and measured values for the shift of the resonance frequency agree well. At the first flexural mode of vibration of 3.5 kHz and at an average temperature rise of the substrate of 100 ° C, a frequency change of 500 Hz in the mass flow range from zero to 15 × 104 sccm can be measured. Indications are proposed for reducing the time response and increasing the sensitivity.
- Keywords:
- thick-film sensors, mass flow measurement, PZT resonators
- Download:
- IMEKO-WC-2000-TC9-P235.pdf
- DOI:
- -
- Event details
- Event name:
- XVI IMEKO World Congress
- Title:
Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future
- Place:
- Vienna, AUSTRIA
- Time:
- 25 September 2000 - 28 September 2000