INDUCTIVE SENSORS IN THICK FILM TECHNOLOGIES |
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| D. Marioli, E. Sardini, A. Taroni |
- Abstract:
- The paper presents two thick film inductive sensors having different configuration: the first is a planar spiral while the second one consists of multi-layer spirals. The paper describes how the two sensors have been made, the materials used and their geometric configurations in order to optimize their metrological performances. The spatial distribution of the magnetic field generated by the two sensors has been simulated, while their impedance, the series-equivalent circuit parameters, as well as their sensitivity to temperature variation have been measured in the laboratory. Moreover the multi-layer sensor has been tested in the measurement of a metallic object profile. A processing electronics based on a synchronous demodulation technique extracts the inductance variation induced by the changing of the profile height. A preliminary test, cross calibrated with an optical system, shows an height resolution less than 10 µm and a lateral resolution less than 2 mm.
- Keywords:
- inductive sensor, thick film, profile measurement
- Download:
- IMEKO-WC-2000-TC4-P146.pdf
- DOI:
- -
- Event details
- Event name:
- XVI IMEKO World Congress
- Title:
Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future
- Place:
- Vienna, AUSTRIA
- Time:
- 25 September 2000 - 28 September 2000