LOW-COHERENT INTERFEROMETRY DEFECTS MEASUREMENTS

I. V. Golubev, E. V. Sysoev, Y. V. Chugui
Abstract:
Profile measurement of the surface defects (with the depth of dozens of microns), based on the low-coherent interferometry, is discussed in this paper. The major challenge for production of such devices is selecting interference zones, which are used to determine the isolines of the defect depth. A direct way to find lowcontrast interference zones in a large dynamic light range appears to be an extremely difficult procedure. We propose an effective interference zones localization technique based on the reference wave phase modulation that against others provides high measurement accuracy and reliability. The reconstructed 3D-image and depth isoline map of 50 µm deep defect on the metallic surface of the fuel element are also presented.
Keywords:
surface defects, interferometry
Download:
IMEKO-WC-2000-TC2-P037.pdf
DOI:
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Event details
Event name:
XVI IMEKO World Congress
Title:

Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future

Place:
Vienna, AUSTRIA
Time:
25 September 2000 - 28 September 2000