THE NON-CONTACT MEASUREMENT OF ULTRA-PRECISION HEMISPHERE
S. Deng, Q. Zhao, H. Zhang
Abstract:
As the high rotating speed of air bearing in astronautic gyro, the geometrical parameters (radius, sphericity) of its hemispherical contour must be with ultrahigh accuracy in the order of sub-micrometer. The non-contact pneumatic measurement technique is applied. In this paper, a new type of “air-pin” so-called pneumatic electronic sensor developed by the authors is introduced first. This sensor consists of fine nozzle of less than 0.15 mm in diameter, and its measurement resolution is 0.01 µm, measurement repeatability is within ± 0.05 µm. The spherical pneumatic gauge with multi-nozzles and sensors is used in a computer-based testing system to measure radius and sphericity of hemispherical surface. The measurement uncertainty of this system is less than ± 0.5 µm. It has been used in a project of measuring hemispherical surface of an air bearing of astronautic gyro. It can also be used to measure different three dimension contour in precision engineering
Keywords:
measurement, non-contact, sphere
Download:
IMEKO-WC-2000-TC2-P036.pdf
DOI:
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Event details
Event name:
XVI IMEKO World Congress
Title:

Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future

Place:
Vienna, AUSTRIA
Time:
25 September 2000 - 28 September 2000
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