THE DIFFRAXICON-INTERFEROMETER FOR CYLINDER TESTS
S. Brinkmann, T. Dresel, R. Schreiner, J. Schwider
Abstract:
The shape measurement of technical cylinder mantle surfaces requires special measures to obtain a spatially low frequency interferogram indicating the shape deviations from an ideal cylinder surface. For this purpose the use of diffraxicons is proposed and demonstrated. The surface roughness is sufficiently eliminated by grazing incidence interferometry for high quality surfaces becoming more and more essential for high accuracy applications as e.g. in the nanotechnology and modern lithography.
Keywords:
interferometry, computer-generated holograms, interferometric cylinder test
Download:
IMEKO-WC-2000-TC2-P032.pdf
DOI:
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Event details
Event name:
XVI IMEKO World Congress
Title:

Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future

Place:
Vienna, AUSTRIA
Time:
25 September 2000 - 28 September 2000
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