3D SURFACE INSPECTION WITH A DMD BASED SENSOR
F. Bitte, H. Mischo, T. Pfeifer, G. Frankowski
Abstract:
In this paper a method for non-contact scanning of small structures is presented similar to that of confocal microscopy but using the technology of Digital Micromirror Devices (DMD) instead of ordinary pinholes. It offers parallel scanning of various specimen following to a principle, where a DMD is used for illumination and a selective CCD for detection. The fundamental concepts concerning system layout and system performance as well as measurement results with a first experimental demonstrator are presented.
Keywords:
metrology, surface inspection, confocal microscope, digital micromirror device, DMD, micro-systems technology
Download:
IMEKO-WC-2000-TC2-P031.pdf
DOI:
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Event details
Event name:
XVI IMEKO World Congress
Title:

Measurement - Supports Science - Improves Technology - Protects Environment ... and Provides Employment - Now and in the Future

Place:
Vienna, AUSTRIA
Time:
25 September 2000 - 28 September 2000
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