CHARACTERISATION OF 10 Pa VACUUM GAUGE USING PRESSURE BALANCE |
|---|
| SamYong Woo, In-Mook Choi, Tae Heon Yang, HanWook Song |
- Abstract:
- This paper presents an extended usage of gas pressure balances for measurements of pressure down to below 10 Pa. This pressure range is too low to measure by using commercial pressure balances. This is because their inability to operate at pressures below a limit determined by the mass of floating elements. Using a variable bell-jar pressure method developed at KRISS, we can overcome this pressure limit. Additionally, we investigated the lowest achievable pressure limit using commercial 133-Pa CDG (Capacitance Diaphragm Gauge).
- Keywords:
- vacuum gauge, pressure balance, calibration, variable bell-jar pressure method
- Download:
- IMEKO-WC-2012-TC16-P10.pdf
- DOI:
- -
- Event details
- Event name:
- XX IMEKO World Congress
- Title:
Metrology for Green Growth
- Place:
- Busan, REPUBLIC of KOREA
- Time:
- 09 September 2012 - 12 September 2012