ANALYSIS OF LASER FOCUSING CR DEPOSITION FOCUSING ON THE EFFECTS OF LASER POWER
Zhang Bao-wu
Abstract:
Deposition of Cr for nano-grating structure is examined from a wave-mechanical perspective, focusing on the effects of laser power. The result shows that considering the wave character of Cr atom, the focal plane will vary with laser power. So in order to obtain good nanogration structures, it is better to locate the substrate at the focal plane according to different laser power. When the focal plane coincides with the Gaussian center, the nanograting has good structure quality in range of [-0.2, 0.2] in y direction, while beyond that the structures will diffuse, and even disappear. The nanograting in the plane of Y=0 has the average space of 212.78 nm, FWMH of 4.25 nm, and contrast of 5.7.
