APPLICATION OF PSI/SCM MICROSCOPE FOR NANOINDENTATION TESTER |
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| Masayuki Fujitsuka, Makoto Yamaguchi, Shigeru Ueno, Genichiro Kamiyama, Shigeo Katayama |
- Abstract:
- Instrumented indentation test is a simple and effective method for evaluating the mechanical properties such as elasticity/stiffness, hardness and adhesion. Generally it is the method that doesn't have to observe the residual impression and around the indentation area. However, it is necessary to observe the residual impression and surface of test piece to obtain the material behaviour such as pile-up/sink-in, crack. Recently atomic force microscope (AFM) and 3-D scanning electron microscope (3-D SEM) are used as the techniques for measuring the residual impression and surface of test piece in the three-dimensions. Especially, AFM is used mainly, however, it is necessary to correct shape in the point of cantilever in measuring procedure. And also, measuring them by AFM precisely, the vacuum atmosphere and clean environment and so on are needed. As for 3-D SEM, it is similar.
In this paper, authors focused the phase shifting interferometer (PSI)/ scanning confocal microscope (SCM) combined optical system for nanoindentation tester to observe the residual impression and the surface of the test piece. The utility of this optical system is confirmed, and the nanoindentation tester that is able to be the three-dimensional shape observation is developed. This tester is able to observe the three-dimensional shape easy and quick in complete noncontact and measuring in various environmental conditions. The observation data of residual impression and the surface of the test piece are obtained at the nano-meter order. - Keywords:
- residual impresion, PSI/SCM microsocope, surface observation
- Download:
- IMEKO-WC-2009-TC5-329.pdf
- DOI:
- -
- Event details
- Event name:
- XIX IMEKO World Congress
- Title:
Fundamental and Applied Metrology
- Place:
- Lisbon, PORTUGAL
- Time:
- 06 September 2009 - 11 September 2009