ANALYSIS OF MEASUREMENT UNCERTAINTY IN THE PROCEDURE OF GROOVE DEPTH MEASUREMENT
Gorana Baršic, Biserka Runje, Sanjin Mahovic
Abstract:
This paper presents summary of influencing quantities in the procedure of measurement groove depth d by use of Epival-Interphako interferometric microscope. The expression of mathematical model describing the dependence of measured depth of groove d in relationship with all of the influencing components has been presented.
Influencing quantities have been analyzed, and the magnitudes of contribution of those quantities that are considered to have the largest influence on uncertainty of the result have been calculated.
This analysis has been done based on guidelines for calculation of measurement uncertainty: ISO Guide to the Expression of Uncertainty in Measurement (GUM) and Supplement 1 to the GUM – Propagation of distribution using a Monte Carlo method.
Keywords:
measurement uncertainty, interferometric microscope, Monte Carlo method
Download:
IMEKO-WC-2009-TC14-111.pdf
DOI:
-
Event details
Event name:
XIX IMEKO World Congress
Title:

Fundamental and Applied Metrology

Place:
Lisbon, PORTUGAL
Time:
06 September 2009 - 11 September 2009
 Back