THREE DIMENSIONAL PROFILE MEASUREMENT OF FOUR-STEP REFERENCE SPECIMENS USING THE FRINGE SCANNING FOURIER TRANSFORM METHOD
Chu-Shik Kang, Jae Wan Kim, Jong-Ahn Kim, Tae Bong Eom
Abstract:
A new method of three-dimensional profile measurement of four-step reference specimens is presented. Instead of measuring only the height difference between central points of the two neighbouring surfaces of the specimen, overall profile of the whole specimen can be measured by using the fringe scanning Fourier transform method. The method to determine step height from its surface profile is proposed.
Keywords:
step height, profile measurement, Fourier transform
Download:
IMEKO-WC-2009-TC14-102.pdf
DOI:
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Event details
Event name:
XIX IMEKO World Congress
Title:

Fundamental and Applied Metrology

Place:
Lisbon, PORTUGAL
Time:
06 September 2009 - 11 September 2009
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