A NOVEL SOL-GEL-BASED SENSOR FOR HUMIDITY DETECTION

G. Betta, S. Esposito, M. Laracca, M. Pansini
Abstract:
In the last years there were widespread uses and applications of humidity sensors in many different fields. In response to this situation, various kinds of humidity sensors, based on different materials and sensing principles, have been developed. The paper proposes a novel resistive humidity sensor based on cobalt doped silica thin film deposited on a quartz support by means of a sol-gel technology. This represents a first step in the realization of an integrated sensor able to measure both umidity and gas in environmental pollution applications.
Download:
IMEKO-TC4-2008-166.pdf
DOI:
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Event details
IMEKO TC:
TC4
Event name:
Exploring New Frontiers of Instrumentation and Methods for Electrical and Electronic Measurements
Title:
XVIth IMEKO TC4 International Symposium on Electrical Measurements and Instrumentation (together with 13th IMEKO TC4 Workshop on ADC Modelling and Testing)
Place:
Florence, ITALY
Time:
22 September 2008 - 24 September 2008