DISPLACEMENT MEASUREMENT OF AN INDENTATION TESTER USING HETERODYNE INTERFEROMETER |
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| K. Hattori, S. Takagi, Y. Seino, H. Nakano |
- Abstract:
- We have developed an heterodyne laser interferometer system to measure the indenter displacement of instrumented indentation at nano-/micro- ranges. The developed interferometer was applied to measure the displacement of an commercial type indentation tester. The interferometer system and the tester was set on the different anti-vibration systems. So the main difficulty of this measurement was how to got rid of the relative vibration effect. We designed the system as that the reference points of the system is set to the displacement measurement mirrors on the testers. The total stability of the displacement measurement system was about 10 nm in spite of the larger amplitude of the relative vibration, which is larger than the 1 mm. We can successfully measure the indenter displacement by using newly designed interferometer system and is compared the displacement signal obtained from the tester.
- Keywords:
- Nanoindentation; Displacement measurement; Heterodyne interferometer
- Download:
- IMEKO-TC5-2002-018.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC5
- Event name:
- Joint International Conference on Force, Mass, Torque, Hardness and Civil Engineering Metrology in the age of globalization
- Title:
- 8th HARDMEKO Conference on Hardness Measurement (together with 18th TC3 Conference on Force, Mass and Torque and 1st TC20 Conference on Civil Engineering Metrology)
- Place:
- Celle, GERMANY
- Time:
- 24 September 2002 - 26 September 2002