Three technologies met in the absolute pressure range 0,5 Pa to 3 Pa |
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| Pierre Otal, Jean-Claude Legras |
- Abstract:
- The LNE standards around 1 Pa absolute are constituted by a force-balanced piston gauge (FPG), 100 Pa capacitance diaphragm gauges (CDGs), and spinning rotor gauges (SRGs). The key parameters limiting the performance of the devices are presented. The results of a comparison involving at the same time the three instruments are presented and discussed, as well as the capabilities of these instruments in this range. As an example, the repeatability of measurements, and the linearity error in the comparison are less than 2 mPa.
- Keywords:
- capacitance diaphragm gauge, spinning rotor gauge, force piston gauge, thermal transpiration effect
- Download:
- IMEKO-TC16-2007-038u.pdf
- DOI:
- -
- Event details
- IMEKO TC:
- TC16
- Event name:
- Cultivating Metrological Knowledge
- Title:
- 3rd Conference on Pressure Measurement (together with 20th TC3 Conference on Measurement of Force, Mass and Torque & 1st TC22 Conference on Vibration Measurement)
- Place:
- Merida, MEXICO
- Time:
- 27 November 2007 - 01 December 2007